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Exicor 450AT Exicor 450AT logo


The 450AT is capable of measuring heavy optics to 110 kg and is applied most often for the lithography optics industry.


Specification:
Maximum Sample Size:   1500mm x 1500mm x 300 mm
Maximum Sample Weight:   TBD
Range:   0.01 nm to 120 nm
Resolution/Repeatability:   ±0.005 nm or 1%
Angular Resolution:   ±1° at 0.5 nm retardation
Measurement Time:   <2 second per point
Measurement Units:   nm (retardation), ° (angle)
Measurement Spot Size:   1 mm
Modulation System:   Hinds Instruments Ultra Low Birefringence Photoelastic Modulator
Modulation Frequency:   50 kHz
Wavelength:   632.8 nm
OPTIONS:   Maximum View State, IR Wavelengths (please see accessories section)
APPLICATIONS:   Film; LCD

  Exicor 450 AT
 
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