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The 450AT is capable of measuring heavy optics to 110 kg and is applied most often for the lithography optics industry. |
| Retardation Range: |
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0.005 nm to 100+ nm |
| Retardation Resolution / Repeatability1: |
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0.001 nm / ± 0.008 nm |
| Angular Resolution / Repeatability: |
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0.01º / ± 0.05º |
| Measurement Time2: |
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Up to 10 pps |
| Modulation Frequency: |
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50 kHz |
| Wavelength3: |
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632.8 nm |
| Spot Size: |
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~ 1 mm typical |
| Demodulation Analysis Technique: |
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Lock-in Amplifier |
| Measurement Units: |
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nm (retardation), º (angle) |
| Maximum Sample Size: |
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450 mm x 450 mm x 300 mm |
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| OPTIONS: |
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Maximum View State, IR Wavelengths (please see accessories section) |
| APPLICATIONS: |
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Film; LCD |
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1 Typical performance at 5nm retardation
2 Maximum data collection speed. Sample XY scan time dependent on stage movement parameters.
3 Custom wavelengths available |
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